Providing
system solutions that work. High Purity and Wet Process
Equipment
Kitz
Products
In the Semiconductor and Flat Panel Display tools, the important
considerations for Wet-systems are similar to a gas delivery system;
Ultra-High Purity and extended cycle life. KITZ SCT improved the
FD Series to improve particle free operation and increase the mean
time to failure (MTF). The new FCD Series also was designed as a
more compact valve, meeting market needs of reduced size with increased
performance. FCD Series has multiple features for tool applications
such as open-close indicator, various types of end connections,
and rotatable direction of air inlet port.
In addition, the FCD Valve Series partners with the TB Series PFA
fusion weld fitting for a leak-free, compact piping system.