APPLICATIONS
Yamatake has developed many different types of wet process
sensing products that are tailored to specific application
needs. The illustration shows the type of sensor that is
typically used at each point in the chemical management
process.
There are many unique
features and capabilities of each type of sensor and this
brochure will outline for you this information so that you
can determine if your specific application is similar and
will require the identified proposed solution.
Based on conversations
with many OEM's, we have organized a chart showing the general
guidelines for leak detection and part compatibility with
both acidic and organic solvent liquids.
Acids
No Metal or SUS Parts
No Explosive Fumes Present
PVC/CPVC Pan Material
Self-Contained Leak Detector
HPQ-D11/D12 Series
With CPCV Bracket
No Floating Head Detection Function
Organic Solvents
No Plastic Parts
Need Inherently Safe Design
SUS Pan Material
Fiberoptic Leak Detector
HPF-D040
With PFA and SUS grommet Bracket
Floating Head Detection Function
In general, wafer cleaning
trending towards more organic solvents.
Of course, all of the
above depends on the solution concentrations and should
only be used as a general guideline.
SELF-CONTAINED, OPTICAL LEAK DETECTOR
The HPQ-D leak detection
sensor family is the first of its kind to be constructed
entirely of sealed, Teflon(r) PFA material and be
configured in a self-contained package smaller than
a quarter. It does not require a fiberoptic amplifier
to be used since there is a useable NPN or PNP transistor
output with each sensor. Typically, only 1ml of
liquid in contact with the optical focal point will
change the sensor's output. This enables early detection
of caustic chemical spills and can be used to shut
down the tool immediately, which minimizes the environmental
impact.
A large gain signal difference between no liquid
and liquid detection ensures low probability of
false detection. The fail safe design provides a
normally closed output that turns off when liquid
is detected.
Easily viewable green LED signifies normal operation
and an orange LED turns on when liquid is detected
and output is shut off. The bracket assembly is
made of CPVC material and has an over/under patented
style that assures solid retention once locked down
and the ability to remove the sensor for maintenance
or output checking.
The underside of bracket is flat and has perforated
mounting holes so you can mount with hardware or
adhesive.
Features
and Benefits
Sealed, Chemically Resistant Materials
- 13mm circular sensor pancake lays on
bottom of semiconductor wet process tool
and detects liquid leak or spill by refraction
light principle (see illustration on this
page).
Body is Teflon(r) PFA material with
IP67 sealing and the mounting bracket
assembly is CPVC.
2 meters of PFA covers the sensing end
of the electrical cable.
Quick Detection Minimizes Environmental
Impact and Messy Cleanup - Typically,
1ml of liquid contact with the optical
focal point will trigger the signal change.
Fail Safe Design - Output current is
conducted in normal dry conditions and
will turn off in the presence of liquid.
The sensor can be used with any pan
material color.
UL508 and CE approval by end of 2002.
UL991 evaluation report based on applicable
SEMI S2 Standards will also be available.
PNP and NPN output versions are available.
Condition Indication Using Easy-to-View
LED's - Green LED indicates normal dry
condition and proper operation, orange
LED indicates when liquid is detected
or operation is stopped.
Low Initial and Operational Cost - The
HPQ-D series is priced very aggressively
and will require little maintenance unlike
other prevailing technologies.
Catalog Listings
HPQ-D11-L05
NPN Output,
5 meter electrical cable(USA Standard)
HPQ-D12-L05
PNP Output,
5 meter electrical cable (USA Standard)
HPQ-D11
NPN Output, 2 meter electrical cable
(JAPAN Standard)
HPQ-D12
PNP Output,
2 meter electrical cable (JAPAN Standard)
Floating
Head Detection
Schematics
Catalog Listings
HPQ-D11
HPQ-D12
Supply Voltage
12-24
VDC +/- 10% (Ripple 10% max.)
Current
Consumption
30 milliamp max.
Usable
Pen
CPVC,
Stainless Steel, etc.
Output
Mode
NPN
Transistor PNP Transistor
Output
Load
Current 50 mA max (resistive load)
Saturation Voltage 1V max.
Short Circuit, False Pulse,
Reverse Polarity Protection.
Light
Source
Red
LED (645 nm)
Indicator
Green
ON: Normal Condition
Orange ON: Liquid Detection
The HPF-D040 fiberoptic leak
detector is inherently safe in that there is no
circuitry at the sensing point, only light from the
associated amplifier. The amplifier would be mounted
out of the immediate sensing area. The small and
narrow sensing head and bracket are composed of
chemically resistant Teflon(r) PFA material.
A detachable mounting bracket block with an
integral 316SS mounting grommet insures adequate
retention while offering easy maintenance
capability. The 5 meters of cable length has a 60
micron covering of PFA material that provides
chemical protection along with field
cut-to-desired-length ability.
Quick detection of spills is
adjustable via the amplifier used. 1ml of liquid
typically is required to change the amplifier's
state. The fail safe design is achieved by
conducting light back to the amplifier when liquid
is not present. Liquid presence or a cable break
will stop the light from being returned. Unlike the
self-contained version and competitive offerings,
the customer's pan is used to stabilize and adjust
the light return when setting the amplifier. If the
sensor becomes unattached and no longer sees the pan
reflection, the output will turn off. We call this
"floating head detection" capability.
Features and Benefits
Sealed, Chemically Resistant Materials
- 13mm circular sensor pancake lays on
bottom of semiconductor wet process tool
and detects liquid leak or spill by
refraction light principle (see
illustration on this page).
Inherently Safe - Optical light is
used from a remotely mounted fiberoptic
amplifier.
Sealed, chemically resistant materials
- PFA housing and bracket with 316SS
mounting grommet.
Quick Detection minimizing
environmental impact and messy cleanup -
typically, 1ml of liquid contact with
the optical focal point will trigger the
signal change. Sensitivity is adjustable
to some extent by the amplifier used.
Fail Safe Design - Sensing light is
conducted from amplifier emitter,
reflected off pan, then returned to
amplifier receiver. When liquid is
present or cable breaks, amplifier
changes state.
Floating Head Detection Capability -
If the sensing head becomes unattached
from the pan, the amplifier will change
state. There is no reflective surface
included in the head design.
Usage Notes
Handle with care because the surfaces
can be damaged easily.
Material - Sensor Housing: PFA,
Mounting Base: PFA, Grommet: SUS316L,
Fiber Cable: See "Viewed from A".
Fiber cables can be cut with an
included tool FE-PA-F1.
Depending on color and viscosity of
the liquid, no detection can be made.
Do not make over-stress on the housing
by pulling the cables.
Mounting base can be detached from the
sensor body.
Specifications
Scanning Type
Diffuse Scan
Target
Liquid Note: Depending on color and
viscosity of the liquid, no detection can be
made
Tensile Strength
10N max.
Bending Radius
R20mm min.
Operating Temperature
-30+70 C
Amplifier Unit
HPX-A, HPX-H, HPX-ET, HPX-NT
(Letters and numbers depend on
specifications)
The HPQ-T sensor is designed
specifically for liquid level detection by
non-contact methods in clear or very
translucent pipes. The sensor is mounted on
a pipe that is between 3 to 7mm or 8 to 13mm
in diameter and features an infrared light
beam that becomes refracted and undetectable
by the receiver when the liquid is present.
The device runs on 10-28 VDC, has a response
time of 2 msec max, has Light Operate/ Dark
Operate Selectable output functioning, and
has a 100 mA NPN or PNP output. There is
minimal malfunction when air bubbles or
water droplets are present. The indicator
light is easy to view even when the sensors
are gang mounted as all the controls and
adjustments are located on the back side.
Features and Benefits
Small compact size and
non-invasive sensing make
installation and height
adjustment easy
Many products to select from -
provides flexibility to user
based on concerns
Infrared beam can help
penetrate slurries and other
solids
with similar detection effect as
water/liquid. This can be
used in mixing sections of the
process.
Light operate / dark operate
selector switch provides output
flexibility.
Indicator lamp is easy to view
even when sensors are
gang mounted
Catalog Listings
HPQ-D11-L05
NPN Output, 5 meter electrical
cable(USA Standard)
HPQ-D12-L05
PNP
Output, 5 meter electrical cable
(USA Standard)
HPQ-D11
NPN Output, 2 meter electrical cable
(JAPAN Standard)
HPQ-D12
PNP
Output, 2 meter electrical cable
(JAPAN Standard)
Operating
Principle
Usage
Recommendation
The standard
gain setting versions work with most
liquids. The 25% gain reduction
should be used when large quantities
of bubbles are present or where
mixing in chambers requires the
sensor to be able to detect
water/fluid, solids, and mixture of
solids/fluids equally. We recommend
that the prospective user evaluate
their chemical combinations and
mixing situations to determine which
sensor works best before finalizing
the specification for use.
Please contact your
local Yamatake sales office as defined on
the back cover of this brochure for
information on these products:
HPX-NT Series Single unit, most
sophisticated, digital output,
microprocessor based, 7 training modes,
3 operation modes, fully adjustable
timers and thresholds
HPX-ET Series Gang mounted, digital
output, microprocessor based, 6 training
modes, fully adjustable timers and
thresholds
HPX-T Series Single unit, digital
output, microprocessor based, 3 training
modes, 40 millisecond off-delay option
HPX Series 3 turn potentiometer with
indication, lowest cost, high power or
low contrast versions recommended
These fiber cables are used
exclusively for liquid level detection in
chemical baths, cleaning baths, and spin
coaters/developers. The liquid surface is
detected by contact of the sensor tip with
the liquid surface. The proprietary tip
structure prevents liquid buildup so stable
detection is maintained. Their bend radius
is less than all known competitors at 30 or
40mm and they have an operating temperature
range of -30 to 105 degree C. Cable length
is 2 meters.
The HPF-EU05 is a handy
fiberoptic extension cord, so to speak, that
can be used to extend the fiberoptic
connection from the sensing fiber back to
the controlling network. Quick
implementation of this extension fiber cable
accessory is provided by: 1) a fiber
fixation lever that operates the same as
those found on a standard fiberoptic
amplifier, 2) small space saving size can be
mounted to a hole cut in the plate with one
motion. Optical coupling power is maximized
by the unitized structure of the fiber
connector.
HPF-T027- This fiber cable is
configured using right angle viewing lenses.
The lenses allow extra scanning power
through the impervious Teflon(r) PFA
covering that is vacuum formed around the
sensing tip and fiber cable body. Cable may
be cut to length at the sensor end.
HPF-T029 - This fiber cable pair is the
latest technology in Teflon cabling. Bend
radius of 20 mm is best in class. Scanning
ranges of 5.25 meters when used with high
power mode of the new HPX-NT series is also
best in class. Additionally, the price is
40% lower than the traditional industry
standard.
This fiber cable pair is completely
covered by an impervious, vacuum formed
Teflon (PTFE) layer over the sensing head
and body of the fiber cable. The sensor end
may be cut to length. This cable pair can be
used in cleaning baths, chemical baths, and
spin coaters/developers found in
semiconductor processes. Fiber cable
assemblies are 100% positive pressure tested
to insure no leaks before shipment.
PIPE
MOUNTED, FIBER CABLE TYPE LIQUID SENSOR
(INHERENTLY SAFE)
The HPF-T032 fiber cable liquid
sensor features a Fail Safe design using an
array style light beam. Unlike all know
competitive offerings, the HPF-T032
emitter/receiver arrangement requires a beam
refraction of 1.33 to 1.7 in order for the
light to be transmitted. This provides the
utmost prevention of false detection due to
deposits on the inside of the chemical
piping. The array arrangement of the fibers
provides a much higher contrast signal level
and the ability to not be affected by
bubbles of even 3mm size. The housing is
made from GE Ultem(r) plastic that is highly
resistant to most organic solvents and is
capable of high temperature exposure. The
HPF-T032 sensor can be used with pipe sizes
from 1/8" to 1/2" (3-13mm) and the fiber
cutter and mounting hardware is shipped with
each sensor. A 60 micron covering of
Teflon(r) PFA material protects the 5 meter
fiber length from chemical attack.
Features and Benefits
Fail Safe Design (Semi S2
Compliant)
Chemically Resistant Materials
Pipe Size 1/8" to 1/2"
(3-13mm)
Uses Multiple Beam Array -
High Contrast Level
Inherently Safe - Optical
Light
Catalog Listings
HPF-T032
5 meter Fiberoptic Cable Liquid
Sensor
Usage
Recommendation
The HPF-T032 fiber
sensor has an outside fiber
dimension of 2.3mm. We recommend
that the HPX-NT or the HPX-ET series
be used in conjunction with this
fiber to insure insertion ability
without scraping Teflon film upon
insertion. The NT and ET sensor
series are visible red in nature so
penetration through slurries and
ability to sense slurries same as
clear liquid may be limited. The
HPF-T032 is not sealed from liquid
penetration so care should be taken
to protect polycarbonate prisms in
sensing head from chemical attack.
Please request assistance from
Yamatake for programming options
that will work in your specific
application.
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